TY  - BOOK
AU  - Tai-Ran Hsu
TI  - Mems and Microsystems: design and manufacture
SN  - 0072393912
U1  - 621.381 
PY  - 2002///
CY  - New Delhi
PB  - Tata McGraw-Hill Education
KW  - Microelectronics
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
N1  - Includes index; Bibliography: p. 427-431
ER  -