Tai-Ran Hsu <br/><br/>
Mems and Microsystems:  design and manufacture/ 
Tai-Ran Hsu 
 - New Delhi:  Tata McGraw-Hill Education,  c2002 
 - xii, 436 p.:  ill., plates;  24 cm. 
<br/><br/> Includes index 
<br/><br/>Bibliography: p. 427-431 
<br/><br/><label>ISBN: </label>0072393912 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Microelectromechanical systems<br/>Microelectronic packaging
<br/><br/><label>Dewey Class. No.: </label>621.381