TY  - BOOK
AU  - Choudhary,Vikas
AU  - Iniewski,Krzysztof
TI  - MEMS: fundamental technology and applications 
SN  - 9781466515819
U1  - 621.381 22
PY  - 2013///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
N1  - Includes bibliographical references and index
ER  -