MEMS :  fundamental technology and applications / 
edited by Vikas Choudhary; Krzysztof Iniewski 
 - Boca Raton:  CRC Press,  ©2013 
 - xxii, 456p. ;  26 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781466515819  £ 114.99 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microelectronic packaging
<br/><br/><label>Dewey Class. No.: </label>621.381