TY  - BOOK
AU  - Lovasz,Erwin-Christian
ED  - Conference on Microactuators and Micromechanisms
TI  - Proceedings of ...
SN  - 9783319158617
U1  - 621.381 22
PY  - 2015///
CY  - Cham, Germany
PB  - Springer
KW  - Microelectromechanical systems
N1  - Includes bibliographical references
ER  -