Proceedings of .../ 
eds. Erwin-Christian Lovasz ...[et. al] 
 - Cham, Germany :  Springer,  2015 
 - xiii, 199 p.:  mostly col. ill. ;  24 cm. 
 - Mechanisms and machine science ;  v. 30 .
<br/><br/>Includes bibliographical references 
<br/><br/><label>ISBN: </label>9783319158617  € 139.99 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381