TY - BOOK AU - Bhushan,Bharat AU - Fuchs,Harald AU - Kawata,Satoshi TI - Applied scanning probe methods V: scanning probe microscopy techniques SN - 9783540373155 U1 - 620.11299 22 PY - 2007/// CY - Berlin PB - Springer KW - Materials KW - Microscopy KW - Scanning probe microscopy KW - Industrial applications N1 - Includes bibliographical references and index ER -