TY  - BOOK
AU  - Rai-Choudhury,P.
TI  - MEMS and MOEMS technology and applications
SN  - 9788120337527
U1  - 621.381 23rd ed.
PY  - 2000///
CY  - New Delhi
PB  - PHI Lerarning
KW  - Microelectromechanical systems
KW  - Optoelectronic devices
N1  - Includes index
ER  -