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EUV sources for lithography/ [ed] Vivek Bakshi

Contributor(s): Material type: TextTextLanguage: English Publication details: Bellingham, Wash. : SPIE Press, c2006Description: xxxv, 1057 p. : ill., ports.; 27 cmISBN:
  • 0819458457
Subject(s): DDC classification:
  • 621.364 22
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Holdings
Item type Current library Collection Call number Materials specified Status Date due Barcode Item holds
Books Books National Library of India New English Oversized - Main Stack Division New English Oversized E/O 621.364 El 19 (Browse shelf(Opens below)) Available 557586
Total holds: 0

Includes bibliographical references and index

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